| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a processing liquid supply mechanism capable of preventing residual processing liquid in a container body. <P>SOLUTION: The processing liquid supply mechanism comprises: a fixed cylinder part projecting upward of a container body from a lid part and screwed on a periphery; a moving cylinder part screwed inside or outside the fixed cylinder part coaxially with the fixed cylinder part; a processing liquid supply pipe passing through a cylinder part comprising the fixed cylinder part and the moving cylinder part and the lid part movably relative to the cylinder part in an axial direction, and fixed to the moving cylinder part at an axial position; and a rotary operation unit having an annular portion provided coaxially with the moving cylinder part. An engaging part and an engaged part are provided in the moving cylinder part and the annular portion, respectively. When the rotary operation unit is rotated, the engaging and engaged parts are engaged with each other and the moving cylinder part rotates. When a torque applied to the moving cylinder part is large, the engaging and engaged parts are disengaged from each other. Thereby, a lower end of the processing liquid supply pipe is brought into contact with a bottom part of the container body and fixed. <P>COPYRIGHT: (C)2012,JPO&INPIT |
