发明名称 SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME
摘要 <P>PROBLEM TO BE SOLVED: To provide a semiconductor device capable of preventing potential variation of a body region caused by potential variation of a power supply wiring. <P>SOLUTION: On a top face of a silicon layer 4, an element isolation insulating film 5 of a partial trench type is selectively formed. A power supply wiring 21 is formed over the element isolation insulating film 5. The element isolation insulating film 5 includes a completely separated part 23 reaching a top surface of an insulating layer 3 under the power supply wiring 21. In other words, the semiconductor device includes the element isolation insulating film of a completely separated type, which is formed so as to reach from the top surface of the silicon layer 4 to the top surface of the insulating layer 3, under the power supply wiring 21. <P>COPYRIGHT: (C)2012,JPO&INPIT
申请公布号 JP2011233909(A) 申请公布日期 2011.11.17
申请号 JP20110142696 申请日期 2011.06.28
申请人 RENESAS ELECTRONICS CORP 发明人 HIRANO YUICHI;MAEKAWA SHIGETO;IWAMATSU TOSHIAKI;MATSUMOTO TAKUJI;MAEDA SHIGENOBU;YAMAGUCHI YASUO
分类号 H01L29/786;H01L21/3205;H01L21/76;H01L21/8238;H01L23/52;H01L27/08;H01L27/092 主分类号 H01L29/786
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