发明名称 SURFACE ACOUSTIC WAVE RESONATOR WITH AN OPEN CIRCUIT GRATING FOR HIGH TEMPERATURE ENVIRONMENTS
摘要 Surface acoustic wave resonators for use in high temperature applications including a piezoelectric substrate, at least one interdigital transducer supported by the piezoelectric substrate, and a grating reflector supported by the piezoelectric substrate, the grating reflector being fabricated of a heavy metal and comprising a plurality of electrodes, at least one electrode of the plurality of electrodes being electrically isolated from at least one other electrode. Methods of making surface acoustic wave resonators are also included.
申请公布号 US2011278985(A1) 申请公布日期 2011.11.17
申请号 US201113050389 申请日期 2011.03.17
申请人 PEREIRA DA CUNHA MAURICIO;MEULENDYK BENNETT;UNIVERSITY OF MAINE SYSTEM BOARD OF TRUSTEES 发明人 PEREIRA DA CUNHA MAURICIO;MEULENDYK BENNETT
分类号 H01L41/107 主分类号 H01L41/107
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