PLASMA GENERATOR AND METHOD FOR GENERATING AND USING AN IONISED GAS

摘要

The present invention relates to a plasma generator and to a method for generating plasma using said plasma generator. The plasma generator comprises at least one plasma chamber having a feed line (10) for a plasma gas (2), a pump connected to the plasma chamber, and an ionising device for generating low pressure plasma in the plasma chamber. The pump is designed as a jet pump (13), which is operated with a working fluid (1) and by which the ionised plasma gas can be extracted from the plasma chamber and mixed with the working fluid (1). The plasma generator is designed such that the negative pressure required for igniting and maintaining the low pressure plasma is set in the plasma chamber by the jet pump (13). Using said plasma generator and the proposed method, low pressure plasma can be generated in a compact arrangement and the ionised gas can be used at atmospheric pressure.