| 发明名称 |
SCANNING ELECTRON MICROSCOPE |
| 摘要 |
A scanning electron microscope having a charged particle beam that when in a state being irradiated toward a sample, a voltage is applied to the sample so that the charged particle beam does not reach the sample. The scanning electron microscope also detects information on a potential of a sample using a signal obtained, and a device for automatically adjusting conditions based on the result of measuring. |
| 申请公布号 |
US2011278454(A1) |
申请公布日期 |
2011.11.17 |
| 申请号 |
US201113190153 |
申请日期 |
2011.07.25 |
| 申请人 |
IKEGAMI AKIRA;YAMAZAKI MINORU;KAZUMI HIDEYUKI;TAKEUCHI KOICHIRO;MURAKOSHI HISAYA;HITACHI HIGH-TECHNOLOGIES CORPORATION |
发明人 |
IKEGAMI AKIRA;YAMAZAKI MINORU;KAZUMI HIDEYUKI;TAKEUCHI KOICHIRO;MURAKOSHI HISAYA |
| 分类号 |
H01J37/28 |
主分类号 |
H01J37/28 |
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