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发明名称
Apparatus for thin layer deposition
摘要
申请公布号
KR101084168(B1)
申请公布日期
2011.11.17
申请号
KR20090052358
申请日期
2009.06.12
申请人
发明人
分类号
H05B33/10;C23C14/24;H01L51/50
主分类号
H05B33/10
代理机构
代理人
主权项
地址
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