| 摘要 |
PURPOSE: A substrate support unit and a substrate processing apparatus and method using the same are provided to minimize incline when rotating by including a substrate support member which supports a substrate. CONSTITUTION: A susceptor(218) supports a substrate. A rotary shaft(220) is installed in the bottom side of the susceptor and rotates the susceptor. A susceptor supporting member(230) is separated with the rotary shaft and supports the bottom side of the susceptor. The susceptor supporting member comprises a supporting plate(238) and a cloud member(234a). The cloud member is provided in order to rotate by contacting the bottom side of the susceptor.
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