发明名称 |
RECYCLE AND REUSE OF SILANE |
摘要 |
Methods and apparatus for recovering and recycling silane and silane/hydrogen mixtures used in making thin film solar cells by plasma-enhanced chemical vapor deposition are described. By collecting unreacted silane or silane-hydrogen mixtures from the deposition chambers and recycling the collected gas to the deposition chambers, utilization of silane can be improved by a factor of 2 to 5. |
申请公布号 |
EP2162389(A4) |
申请公布日期 |
2011.11.16 |
申请号 |
EP20080770204 |
申请日期 |
2008.06.05 |
申请人 |
LINDE LLC |
发明人 |
SAXENA, NEERAJ;MCMULLEN, NIGEL;CUDDEBACK, BRUCE |
分类号 |
C01B33/00;C23C16/24;C23C16/44;C23C16/455 |
主分类号 |
C01B33/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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