| 摘要 |
An epitaxial layer 1 comprising at least two different thicknesses in which a first thickness 3 is configured to detect a first frequency range of incident photons and a second thickness 4 is configured to detect a second frequency range of incident photons, which are converted by related apparatus into images. This allows a user to use different light sources from two or more different images of the same article, without having to change the equipment the epitaxial layer is a part of. Also an epitaxial layer of continuous thickness (11, Fig 6) is disclosed which is configured to detect at least two frequency ranges of photons, allowing images comprising electrons/ photoelectrons in at least the same two frequency ranges to be constructed.
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