| 摘要 |
The method involves sub-dividing a large-area surface (12) to be measured into individual partial areas (14). A matrix of measurement points is determined for each partial area to be inspected. Measured values are ascertained at equidistant measurement points along a row of the matrix of the partial area using a device carrying a measuring probe. The measured values are ascertained successively for all rows of the matrix in the partial area and evaluated for the partial area. The measuring probe is guided over the surface to be measured along a cycloid path. An independent claim is also included for a device for measuring thickness of thin layers on large-scale measurement surfaces. |
