发明名称 Method of making low work function component
摘要 A method for fabricating a component is disclosed. The method includes: providing a member having an effective work function of an initial value, disposing a sacrificial layer on a surface of the member, disposing a first agent within the member to obtain a predetermined concentration of the agent at said surface of the member, annealing the member, and removing the sacrificial layer to expose said surface of the member, wherein said surface has a post-process effective work function that is different from the initial value.
申请公布号 US8058159(B2) 申请公布日期 2011.11.15
申请号 US20080198955 申请日期 2008.08.27
申请人 ROBINSON VANCE;WEAVER STANTON EARL;MICHAEL JOSEPH DARRYL;GENERAL ELECTRIC COMPANY 发明人 ROBINSON VANCE;WEAVER STANTON EARL;MICHAEL JOSEPH DARRYL
分类号 H01L21/22;H01L21/38 主分类号 H01L21/22
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