| 摘要 |
An ultrasonic motor includes a driven object, a piezoelectric element for driving the driven object, a vibration plate including a notch having an inner peripheral surface of an arc-shaped form having a central angle larger than 180 degrees and being vibrated by the piezoelectric element, and a contact portion made of a material different from that of the vibration plate, having a portion overlapping the piezoelectric element in a plan view and being smaller in thickness than the piezoelectric element, attached to the notch of the vibration plate by press fitting or forced fitting and being in contact with the driven object. Thereby, the ultrasonic motor can have a high shock resistance and a high wear resistance, and can be driven with high efficiency. |
