发明名称 Encapsulated phase change cell structures and methods
摘要 Methods and devices associated with phase change cell structures are described herein. In one or more embodiments, a method of forming a phase change cell structure includes forming a substrate protrusion that includes a bottom electrode, forming a phase change material on the substrate protrusion, forming a conductive material on the phase change material, and removing a portion of the conductive material and a portion of the phase change material to form an encapsulated stack structure.
申请公布号 US8058095(B2) 申请公布日期 2011.11.15
申请号 US20090489957 申请日期 2009.06.23
申请人 LIU JUN;MICRON TECHNOLOGY, INC. 发明人 LIU JUN
分类号 H01L21/00 主分类号 H01L21/00
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