发明名称 Film forming apparatus and method of manufacturing light emitting device
摘要 The problem regarding volatileness of a solvent in an EL forming material, which occurs in adopting printing, are solved. An EL layer is formed in a pixel portion of a light emitting device by printing. Upon formation of the EL layer, a printing chamber is pressurized to reach a pressure equal to or higher than the atmospheric pressure, and the printing chamber is filled with inert gas or set to a solvent atmosphere. Thus the difficulty in forming an EL layer by printing is eliminated.
申请公布号 US8056501(B2) 申请公布日期 2011.11.15
申请号 US20090573357 申请日期 2009.10.05
申请人 YAMAZAKI SHUNPEI;SEMICONDUCTOR ENERGY LABORATORY CO., LTD. 发明人 YAMAZAKI SHUNPEI
分类号 B05C11/10;H01L31/12;H01L21/77;H01L27/32;H01L51/40;H01L51/56 主分类号 B05C11/10
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