发明名称 |
DRUCKSENSOREN UND VERFAHREN ZU IHRER HERSTELLUNG |
摘要 |
A pressure sensor includes a base substrate silicon fusion bonded to a cap substrate with a chamber disposed between the base substrate and the cap substrate. Each of the base substrate and the cap substrate include silicon. The base substrate includes walls defining a cavity and a diaphragm portion positioned over the cavity, wherein the cavity is open to an environment to be sensed. The chamber is hermetically sealed from the environment. |
申请公布号 |
AT532044(T) |
申请公布日期 |
2011.11.15 |
申请号 |
AT20060802137T |
申请日期 |
2006.08.22 |
申请人 |
GENERAL ELECTRIC COMPANY |
发明人 |
CHU, STANLEY;GAMAGE, SISIRA KANKANAM;KWON, HYON-JIN |
分类号 |
G01L9/00;B81B3/00;G01L19/00 |
主分类号 |
G01L9/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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