发明名称 |
VORRICHTUNG ZUR VERÄNDERUNG VON OBERFLÄCHEN |
摘要 |
The present invention relates to a process for coating a substrate with a wear resistant layer on the basis of carbon comprising the steps of
i) providing a substrate containing a material which has an affinity for carbon
ii) cleaning a surface of the substrate
iii) deposition of a metal containing layer on the surface
iv) ion-bombarding the coated surface
v) deposition of a carbon layer on the surface. Further, the present invention relates to a substrate with a diamond-like carbon coating on the surface of the substrate and an apparatus for carrying out the process according to the invention. |
申请公布号 |
AT531071(T) |
申请公布日期 |
2011.11.15 |
申请号 |
AT20070801508T |
申请日期 |
2007.08.03 |
申请人 |
CREEPSERVICE S.A.R.L. |
发明人 |
CHIZIK, ANNA ANDREYEVNA;MIKHAILOV, ALEXEI SERGUEIEVITCH |
分类号 |
H01J37/32;B23B51/02;C23C14/22 |
主分类号 |
H01J37/32 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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