| 摘要 |
PURPOSE: An LED chip inspection apparatus is provided to prevent a probe pin and an LED chip from being damaged and precisely measure the property of LED chips. CONSTITUTION: A probe card(10) includes a pair of probe pins which is electrically connected to an LED chip. A stage driver(30) drives a wafer stage. A chip contact unit(60) contacts the LED chip, which is carried to a contact location among LED chips, in the probe pin. The controller controls the drive of the stage driver. The LED chip of a measurement target is transferred to the contact location based on the coordinate of each LED chip which is delivered from a sensing device. The controller controls the rise driving of the chip contact unit based on the contact distance reference value of the LED chip and the probe pin and the LED chip height value of each coordinate which is delivered from the sensing device.
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