LINEARER GASPHASEN-DIFFUSIONSOFEN,申请号AT20090400026T-传众专利搜索

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发明名称	LINEARER GASPHASEN-DIFFUSIONSOFEN
摘要
申请公布号	AT532208(T)	申请公布日期	2011.11.15
申请号	AT20090400026T	申请日期	2009.05.29
申请人	ROTH & RAU AG	发明人	SCHEIT, UWE
分类号	H01L21/00	主分类号	H01L21/00
代理机构		代理人
主权项
地址

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