发明名称 High performance MTJ element for STT-RAM and method for making the same
摘要 An STT-MTJ MRAM cell that utilizes transfer of spin angular momentum as a mechanism for changing the magnetic moment direction of a free layer. The device includes an IrMn pinning layer, a SyAP pinned layer, a naturally oxidized, crystalline MgO tunneling barrier layer that is formed on an Ar-ion plasma smoothed surface of the pinned layer and, in one embodiment, a free layer that is an amorphous layer of Co60Fe20B20 of approximately 20 angstroms thickness formed between two crystalline layers of Fe of 3 and 6 angstroms thickness respectively. The free layer has a low Gilbert damping factor and a very strong polarizing action on conduction electrons. The resulting cell has a low critical current, a high dR/R and a plurality of such cells will exhibit a low variation of both resistance and pinned layer magnetization angular dispersion.
申请公布号 US8058698(B2) 申请公布日期 2011.11.15
申请号 US20100803189 申请日期 2010.06.21
申请人 HORNG CHENG T.;TONG RU-YING;TORNG CHYU-JIUH;KULA WITOLD;MAGIC TECHNOLOGIES, INC. 发明人 HORNG CHENG T.;TONG RU-YING;TORNG CHYU-JIUH;KULA WITOLD
分类号 H01L29/82;G11C11/00 主分类号 H01L29/82
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