发明名称 |
Method for gettering oxygen and water during vacuum deposition of sulfide films |
摘要 |
The present invention is a method for gettering undesirable atomic species from a vaporizing atmosphere during deposition of multi-element thin film phosphor compositions. The method comprises vaporizing one or more getter species immediately prior and/or simultaneously during the deposition of a phosphor film composition within a deposition chamber. The method improves the luminance and emission spectrum of phosphor materials used for full colour ac electroluminescent displays employing thick film dielectric layers with a high dielectric constant. |
申请公布号 |
US8057856(B2) |
申请公布日期 |
2011.11.15 |
申请号 |
US20050077343 |
申请日期 |
2005.03.10 |
申请人 |
CHEONG DAN DAEWEON;DEL BEL BELLUZ PAUL BARRY;COOL STEPHEN CHARLES;NAKUA ABDUL M.;STILES JAMES ALEXANDER ROBERT;LEE YONG-SEON;HUNT TERRY;PUGLIESE VINCENT JOSEPH ALFRED;IFIRE IP CORPORATION |
发明人 |
CHEONG DAN DAEWEON;DEL BEL BELLUZ PAUL BARRY;COOL STEPHEN CHARLES;NAKUA ABDUL M.;STILES JAMES ALEXANDER ROBERT;LEE YONG-SEON;HUNT TERRY;PUGLIESE VINCENT JOSEPH ALFRED |
分类号 |
C23C16/00;B05B5/00;C23C14/06;C23C14/22;C23C14/34;C23C14/56;C23C16/22 |
主分类号 |
C23C16/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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