VORRICHTUNG ZUR ERZEUGUNG VON KALTEM PLASMA IN EINER VAKUUMKAMMER UND VERWENDUNG DIESER VORRICHTUNG ZUR THERMOCHEMISCHEN VERARBEITUNG

摘要

In apparatus for generating cold plasma in an evacuated vessel using a cathode body (1) with hollow plasma confinement chambers (1a), each chamber is associated with a magnetic field source (2) causing electrons to rotate around its lines of force. The cathode body is provided with a cooling fluid circulating element (3) to extract heat generated by the intense ionic bombardment in each of the hollow chambers.