发明名称 METHOD AND STRUCTURE OF PHOTOVOLTAIC GRID STACKS BY SOLUTION-BASED PROCESS
摘要 PURPOSE: A photoelectric cell grid stacking method by a solution-based process and a structure thereof are provided to electronically plate a thick thickness part of copper near to zero stress, thereby improving mechanical strength. CONSTITUTION: A nickel or cobalt layer is plated with photo induction. A silicide layer is arranged by RTA(Rapid Thermal Annealing) of the plated nickel or cobalt layer. A selective barrier layer is evaporated on the silicide layer. A copper layer is attached on a silicide/barrier film layer. A thin protection layer is chemically or electro-mechanically applied on the upper part of the copper layer.
申请公布号 KR20110123663(A) 申请公布日期 2011.11.15
申请号 KR20110039998 申请日期 2011.04.28
申请人 INTERNATIONAL BUSINESS MACHINES CORPORATION 发明人 SHAO XIAOYAN;HOVEL HAROLD JOHN;CABRAL JR. CYRIL
分类号 H01L31/042;H01L31/0224;H01L31/06 主分类号 H01L31/042
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