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发明名称
LICHTEMPFINDLICHE HARZZUSAMMENSETZUNG
摘要
申请公布号
AT530951(T)
申请公布日期
2011.11.15
申请号
AT20020758358T
申请日期
2002.07.18
申请人
BASF SE
发明人
KURA, HISATOSHI;OKA, HIDETAKA;OHWA, MASAKI
分类号
G03F7/031;C08F2/50;G02B5/20;G03F7/00;G03F7/004;H01L21/027;H01L51/50;H05B33/10
主分类号
G03F7/031
代理机构
代理人
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