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发明名称
VERFAHREN ZUR ERZEUGUNG VON EXTREM-ULTRAVIOLETT- STRAHLUNG
摘要
申请公布号
AT532390(T)
申请公布日期
2011.11.15
申请号
AT20030712605T
申请日期
2003.04.22
申请人
KONINKLIJKE PHILIPS ELECTRONICS N.V.
发明人
DERRA, GUENTHER HANS;NIEMANN, ULRICH
分类号
H05G2/00;H05H1/24;H01L21/027
主分类号
H05G2/00
代理机构
代理人
主权项
地址
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