| 摘要 |
<p>PURPOSE: A semiconductor apparatus and a manufacturing method thereof are provided to arrange a lateral wall of a concave part formed on the upper surface of a conductive layer in a vertical direction on a main surface of a semiconductor substrate, thereby improving precision in the concave part as an alignment mark. CONSTITUTION: A photoelectric conversion device is arranged within a semiconductor substrate(SUB). A stopper film is arranged on a main surface of the semiconductor substrate. A first interlayer insulating film(II1) is arranged on the stopper film and photoelectric conversion device. A first metal wiring(AL1) is arranged on the first interlayer insulating film. A second interlayer insulating film(II2) is arranged in order to cover the first metal wiring and photoelectric conversion device. A second metal wiring(AL2) including a concave part(CAV) is arranged on a conductive layer.</p> |
