DEVICE FOR HOMOGENIZING LASER RADIATION

摘要

A device for homogenizing laser radiation contains a plurality of mirror elements which are arranged offset with respect to one another and at which the laser radiation to be homogenized can be reflected in such a way that it is split into a plurality of partial beams corresponding to the number of mirror elements. The partial beams have a path difference with respect to one another as a result of the reflection. The device further has a plurality of lens elements, each of which is respectively assigned to one of the mirror elements in such a way that a respective one of the partial beams can pass through one of the lens elements. A distance between each of the mirror elements and the lens elements assigned thereto is equal to the focal length of the respective lens element.