| 摘要 |
PURPOSE: A collecting apparatus and a controlling method thereof are provided to prevent a reactant from being adsorbed and adhered in a pump by transforming a reactant, which is not collected in a collection space, into the solid powder of low viscosity in a powder formation space. CONSTITUTION: A housing prepares a collection space and a powder formation space. A collecting unit is arranged in the collection space and the powder formation space of the housing. The collecting unit includes a heating element and a plurality of first collecting plates which is arranged on the heating element. The heating element controls the temperature of the powder formation space and the collection space. The collection space and the plurality of the first collecting plates are heated by deposition temperature.
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