| 摘要 |
<P>PROBLEM TO BE SOLVED: To quickly unload a substrate from a stage. <P>SOLUTION: A substrate unloading device 60 sucks and holds a substrate tray 90 that carries a substrate, slides the substrate horizontally on a horizontal plane, and thereby unloads the substrate tray 90 out of a substrate holder 50, and places the substrate tray 90 on an air flloating device 68. The substrate unloading device 60 previously sets the air floating unit 68 so that the top surface thereof can be lower on the side nearer to the substrate holder 50 before the substrate tray 90 proceeds to come, and controls the attitude horizontally, depending on the position of the ongoing substrate tray 90. As the substrate tray 90 makes a way for a guide surface of the tilted air floating device 68, the substrate tray 90 can smoothly be transferred from an air floating device 55 of the substrate holder 50 to the air floating device 68. Accordingly, the substrate tray 90 can be slid at a high speed to unload substrates quickly. <P>COPYRIGHT: (C)2012,JPO&INPIT |
