发明名称 MANUFACTURING METHOD OF ARTICLE HAVING FINE UNEVEN STRUCTURE ON SURFACE
摘要 <P>PROBLEM TO BE SOLVED: To provide a manufacturing method of an article, having a fine uneven structure on a surface, such that transferability of a fine uneven structure of a mold are excellent, air bubbles remaining in a cured body layer are suppressed, and plastic is usable as a base, and a manufacturing time is shortened. <P>SOLUTION: The manufacturing method of the article 1 includes the processes of: forming a coating liquid layer 24 on a surface of the mold 40 on a fine uneven structure side by applying a coating liquid including at least one or more kinds among alkoxysilane, a hydrolysate thereof, and a condensate, a photosensitive acid generator, and a leveling agent; forming a partially cured body layer 26, whose indentation depth under a 0.4 mN test load in terms of nano-indentation measurement is 0.18 &mu;m or larger, by partially curing the coating liquid layer 24; forming a cured body layer 20 by stacking the mold 40 and base 10 one over the other with the partially cured body layer 26 interposed, and then irradiating the partially cured body layer 26 with an active energy beam; and releasing the mold 40. <P>COPYRIGHT: (C)2012,JPO&INPIT
申请公布号 JP2011228674(A) 申请公布日期 2011.11.10
申请号 JP20110071767 申请日期 2011.03.29
申请人 MITSUBISHI RAYON CO LTD 发明人 SAEKI YUMIKO;SUZUKI MASANORI;HATTORI TOSHIAKI;TOKIMITSU TORU
分类号 H01L21/027;B29C59/02;B29K83/00;C08G77/04;C08K5/00;C08K5/5419;C08L83/04 主分类号 H01L21/027
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