| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a small cleaning/drying device and device which perform cleaning in which removal of dirt and drying are performed in the same process, which are an energy saving type where cleaning time is speeded up and an area of a cleaned object is made wide and which can realize high speed cleaning/drying. <P>SOLUTION: The cleaning/drying method of a treated object 11 including a material to be cleaned and removed includes a process for carrying in the treated object 11 to a cleaning/drying chamber 18 under atmospheric-pressure, a process for jetting pressurized/overheated liquid or cleaning solution in a state of pressurized and overheated vapor into the cleaning/drying chamber 18, a process for carrying out the treated object 11 which is cleaned and dried from the cleaning/drying chamber 18. A volume at atmospheric-pressure in vapor of the cleaning solution, which is generated from the cleaning solution jetted into the cleaning/drying chamber 18, is 100 times or greater than a gap volume in the cleaning/drying chamber 18 when the treated object 11 is carried into the cleaning/drying chamber 18 in the cleaning/drying method and the cleaning/drying device for performing the method. <P>COPYRIGHT: (C)2012,JPO&INPIT |
