发明名称 |
GAS-LIFT PUMPS FOR FLOWING AND PURIFYING MOLTEN SILICON |
摘要 |
The embodiments herein relate to a sheet production apparatus, A vessel is configured to hold a melt of a material and a cooling plate is disposed proximate the melt. This cooling plate configured to form a sheet of the material on the melt- A pump is used, in one instance, this pump includes a gas source and a conduit in fluid communication with the gas source, in another instance, this pump injects a gas into a melt. The gas can raise the melt or provide momentum to the melt. |
申请公布号 |
WO2011139406(A1) |
申请公布日期 |
2011.11.10 |
申请号 |
WO2011US27198 |
申请日期 |
2011.03.04 |
申请人 |
VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES, INC.;KELLERMAN, PETER, L.;CARLSON, FREDERICK |
发明人 |
KELLERMAN, PETER, L.;CARLSON, FREDERICK |
分类号 |
C30B11/00;C30B29/06 |
主分类号 |
C30B11/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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