| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a microscope adapter unit in which the loss of light quantity is suppressed. <P>SOLUTION: A microscope adapter unit 4 disposed in an optical path of an illumination light from a light source unit 2 including a light source LS to a sample surface SP comprises a first lens group (lens L4 and L3) and a second lens group (lens L2 and L1). The illumination light is converted into an almost parallel luminous flex by the first lens group, thereby entering into the second lens group. <P>COPYRIGHT: (C)2012,JPO&INPIT |
