发明名称 COMPOSITION FOR PROVISIONAL FIXATION, PROVISIONAL FIXATION MATERIAL, TREATMENT METHOD OF SUBSTRATE AND SEMICONDUCTOR ELEMENT
摘要 <P>PROBLEM TO BE SOLVED: To provide a composition for provisional fixation, capable of forming provisional fixation materials having retention retaining substrates in a process where the high temperature load is applied, and having easily peelable property in a process where the substrates are peeled from supports. <P>SOLUTION: There is provided a composition for provisional fixation, comprising (A) a polyethersulfone, (B) a viscosity-imparting agent such as a phenoxy resin, a polymer having a phenolic hydroxy group, a polymer having a pyrrolidone group and a polyalkylene glycol, and (C) a solvent. <P>COPYRIGHT: (C)2012,JPO&INPIT
申请公布号 JP2011225814(A) 申请公布日期 2011.11.10
申请号 JP20110006127 申请日期 2011.01.14
申请人 JSR CORP 发明人 MIYAMATSU TAKASHI;KAWAGUCHI KAZUO;GOTO HIROFUMI;OKUDA RYUICHI;TAKAMATSU NOBUHIRO;TAKAHASHI SEIICHIRO;HIRO AKIHITO;MORI TAKASHI;TAKAMURA HAZUKI
分类号 C09J181/06;C09J7/02;C09J11/00;C09J201/00;H01L21/301;H01L21/304;H01L21/3065 主分类号 C09J181/06
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