METHOD FOR MANUFACTURING SILICON CRYSTAL

摘要

PROBLEM TO BE SOLVED: To provide a method by which a high quality silicon crystal can be effectively manufactured.

SOLUTION: A method for manufacturing a silicon crystal includes steps of heating and melting a silicon raw material 10 to make a silicon melt 11 before inputting the silicon raw material 10 to an electromagnetic casting furnace (EMC furnace) 20 and inputting the silicon melt 11 to the electromagnetic casting furnace 20. The method is characterized in that the silicon melt 11 is formed by heating the silicon raw material 10 with plasma irradiation 30 and inputting the silicon melt 11 to the electromagnetic casting furnace 20 through a transfer pipe 40 which is capable of controlling the input amount to the furnace by utilizing temperature.

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