| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a cleaning apparatus capable of cleaning conveying rollers for substrates. <P>SOLUTION: The automatic cleaning apparatus, which cleans conveying rollers for substrates used in a color filter substrate manufacturing line, includes: a cleaning means of cleaning the conveying rollers; a liquid feed means of feeding cleaning liquid to the cleaning means; a cleaning liquid storage means of storing cleaning liquid; a vertical movement means of vertically moving the cleaning means; and a control means of controlling the movement of the apparatus. After it is confirmed that no substrates are present on the conveying rollers, the cleaning means is brought into contact with the conveying rollers to perform cleaning while rotating the conveying rollers. <P>COPYRIGHT: (C)2012,JPO&INPIT |
