| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a control device of a molecular pump device which has a function to automatically determine whether a cooling unit installed on a molecular pump is air-cooled or water-cooled, and also to set a control parameter used therein automatically, and also which can cope with an abnormality of the cooling unit. <P>SOLUTION: The control device 1 of the molecular pump device composed of the molecular pump 2 and an external control device 1 that controls the molecular pump 2 includes a discrimination means that determines whether the cooling means of the molecular pump 2 is air-cooled or water-cooled or whether the cooling means 21 is in an abnormal state. <P>COPYRIGHT: (C)2012,JPO&INPIT |
