SUBSTRATE TRANSFER SYSTEM AND SUBSTRATE PROCESSING SYSTEM

摘要

PROBLEM TO BE SOLVED: To provide a substrate transfer system capable of attaining miniaturization by reducing a robot installation area.

SOLUTION: The substrate transfer system 10 includes a substrate transfer robot structured so that a substrate 110 is transferred from the inside of a substrate storage apparatus 11 to the inside of a processing apparatus 20 through an opening 202 formed on the side of the processing apparatus 20 by rotating an arm part (a first arm part 123 and a second arm part 124) and a hand part 125 within a horizontal plane and so that an outer edge of a minimum turning area in such a state that the substrate 110 is supported by the hand part 125 protrudes into the processing apparatus 20 through the opening 202.

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