METHOD FOR MANUFACTURING GRAY TONE MASK AND GRAY TONE MASK

摘要

PURPOSE: A method for manufacturing a gray tone mask and a gray tone mask are provided to manufacture high quality of TFT by forming a pattern between a source and a drain channel section to be high precision. CONSTITUTION: A semi transmissive film(22) is formed on a transparent substrate(21). A light shielding layer(23) is formed on the semi transmissive film. A resist film(24) is formed on the light shielding layer. A resist pattern(24a), which corresponds to the light shielding unit on a mask blank, is formed. The light shielding layer is exposed using the resist pattern as a mask and is etched.