发明名称 HORIZONTAL ARTICULATED ROBOT AND SUBSTRATE TRANSFER SYSTEM EQUIPPED WITH THE SAME
摘要 <P>PROBLEM TO BE SOLVED: To reduce the thickness and size of each arm of a horizontal articulated robot while enhancing the positioning accuracy by improving the operability of each arm. <P>SOLUTION: A first arm 3 includes, on an upper surface of the front end portion of the first arm 3, a first arm protruding portion 43 having a surface positioned higher than an upper surface on the base end side of the first arm 3. A second arm 27 includes, on a lower surface of the front end portion of the second arm 27, a second arm protruding portion 44 having a surface positioned lower than a lower surface on the base end side of the second arm 27. The first arm protruding portion 43 and the second arm protruding portion 44 are positioned so as to be overlapped with each other at least partially in a vertical positioning height range. <P>COPYRIGHT: (C)2012,JPO&INPIT
申请公布号 JP2011224743(A) 申请公布日期 2011.11.10
申请号 JP20100098054 申请日期 2010.04.21
申请人 YASKAWA ELECTRIC CORP 发明人
分类号 B25J9/06;H01L21/677 主分类号 B25J9/06
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