| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a conductive substrate with a transparent conductive layer, having a formed texture of excellent light confinement effect. <P>SOLUTION: The conductive substrate with the transparent conductive layer having zinc oxide as major component is formed on the conductive substrate. The transparent conductive layer is formed of a successive lamination of a first transparent conductive layer, having zinc oxide as major component, and a second transparent conductive layer, having zinc oxide as major component. The first transparent conductive layer includes nitrogen atoms of 5×10<SP POS="POST">18</SP>/cm<SP POS="POST">3</SP>or more, and 5×10<SP POS="POST">21</SP>/cm<SP POS="POST">3</SP>or less, as atom concentration measured by SIMS. The second transparent conductive layer includes boron atoms of 2×10<SP POS="POST">19</SP>/cm<SP POS="POST">3</SP>or more, and 2×10<SP POS="POST">21</SP>/cm<SP POS="POST">3</SP>or less, as atom concentration measured by SIMS. Further, the conductive substrate with the transparent conductive layer includes hydrogen atoms of 2×10<SP POS="POST">20</SP>/cm<SP POS="POST">3</SP>or more, and 8×10<SP POS="POST">21</SP>/cm<SP POS="POST">3</SP>or less. <P>COPYRIGHT: (C)2012,JPO&INPIT |
