| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a dry vacuum pump device enabling miniaturization of the entire device by cooling with a high efficiency cooling means with a cooling liquid large current circuit component parts of a large self heat generation amount represented by an switching element constituting an inverter in a dry vacuum pump device driven by an inverter. <P>SOLUTION: The dry vacuum pump device converts an alternating current power from an alternating current power source 19 to a direct current power of a predetermined voltage via a rectifier 13 and a DC/DC conversion circuit 16, and converts the same to an alternating current power of a predetermined frequency with an inverter 17 for supplying the same to an electric motor 11 for driving a dry vacuum pump 12. It comprises an electric equipment enclosure 21 for storing the entire control electronic circuit including the inverter 17, a pump enclosure 22 for storing the dry vacuum pump 12 and operation monitoring sensors, and a liquid cooling partition wall 23 disposed betwen the electric equipment enclosure 21 and the pump enclosure 22 for circulation of a cooling liquid in the inside for providing an enclosure 24 integrally. <P>COPYRIGHT: (C)2012,JPO&INPIT |
