发明名称 WIRE SAW MACHINE AND CUTTING METHOD USING THE SAME
摘要 <P>PROBLEM TO BE SOLVED: To provide a wire saw machine which includes wires of long life and which has high working accuracy and high reliability. <P>SOLUTION: A supply device 10 and an ultrasonic wave propagator 12 are glass-made tubes and connected to each other by welding. The other end of the supply device 10 is connected to plastic piping. Slurry or a cutting liquid 11 is made to flow in the supply device through the plastic piping, pass through the tubular ultrasonic wave propagator 12 and arrive at the wire 2. A groove 14 is formed on the tubular ultrasonic wave propagator 12 by using the wire 2 so that the tip of the ultrasonic wave propagator 12 reaches the lower part of the wire 2. Since a distance between the groove 14 arranged on the ultrasonic wave propagator 12 and the wire 2 is &le;1 mm, the wire 2 is always in contact with the slurry or cutting liquid 11. The ultrasonic vibration of a Langevin type ultrasonic vibrator 13 is propagated to the ultrasonic wave propagator 12, surely propagated to the slurry or cutting liquid 11 and made to reach the wire 2 to vibrate the wire 2 ultrasonically. <P>COPYRIGHT: (C)2012,JPO&INPIT
申请公布号 JP2011224762(A) 申请公布日期 2011.11.10
申请号 JP20100109670 申请日期 2010.04.19
申请人 ONISHI KAZUMASA 发明人 ONISHI KAZUMASA
分类号 B24B27/06;B28D5/04;H01L21/304 主分类号 B24B27/06
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