| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a processing device for positioning a workpiece and easily placing it on a chuck table. <P>SOLUTION: The processing device includes the chuck table having a holding face for holding the workpiece and a processing means for processing the workpiece held by the chuck table. The device includes an image pickup means for an image pickup of an upper face of the workpiece, a temporary holding means which selectively holds the workpiece on the chuck table and installed in the image pickup means detached from the chuck table, and a moving means which relatively moves the chuck table and the image pickup means in two directions parallel to the holding face. While the temporary holding means temporarily holds the workpiece, the moving means is driven, a center of the workpiece is matched with a center of the chuck table and the workpiece is placed on the chuck table. <P>COPYRIGHT: (C)2012,JPO&INPIT |
