| 摘要 |
For enabling to prevent ill effects from being generated in the structures of a reflection mirror, even if increasing an output energy from a light source, thereby preventing ill influences from being exerted on the driving condition thereof, a mirror drive controller unit 7 reads out history data of the past, relating to temperature changes on a micro mirror 1, from a first LUT holder unit 19. Upon basis of the read-out history data of the past is presumed the temperature on the micro mirror 1 at the present time. The presumed temperature on the micro mirror 1 is temperature P temp of the micro mirror 1 at the present time, and upon that P temp are changed vibration (or oscillation) condition of the micro mirror 1 in the horizontal (H) direction and vibration (or oscillation) condition thereof in the vertical (V) direction. |
