METHOD FOR FORMING GROOVE OF POLISHING PAD

摘要

PROBLEM TO BE SOLVED: To provide a method of forming a groove of a polishing pad with which a groove at a desired position with desired width and depth can be formed concentrically with the rotation center of a polishing head on a polishing surface of the polishing pad in a simple manner.

SOLUTION: The method includes: a grinding bite positioning step of positioning the grinding bite immediately below a predetermined position where the groove is formed on the polishing pad 26; and a groove forming step of forming grooves 60a, 60b and 60c concentric with the rotation center of the polishing head 24 on the polishing surface 26a of the polishing pad 26 mounted to the polishing head 24 by performing lowering action of lowering the polishing pad 26 by a distance corresponding to a predetermined depth from a height at the upper end of the grinding bite on a chuck table so as to grind the predetermined depth from the polishing surface of the polishing pad 26 and parallel relative moving action of relatively moving the polishing pad 26 and the grinding bite by a predetermined width in a direction parallel to the direction of the polishing surface 26a so as to grind the polishing pad 26 by the predetermined width while rotating the polishing pad 26.

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