| 发明名称 |
METHOD AND APPARATUS FOR TEMPLATE SURFACE TREATMENT, AND PATTERN FORMING METHOD |
| 摘要 |
<P>PROBLEM TO BE SOLVED: To form a release layer with a high evenness on a template surface. <P>SOLUTION: A template surface treatment method includes hydroxylating the surface of a template having an uneven pattern or absorbing water on the surface to distribute OH radicals on the surface, and coupling a coupling agent on the template surface on which the OH radicals are distributed. These steps are performed in an environment in which amines are controlled to be in a predetermined concentration or less. <P>COPYRIGHT: (C)2012,JPO&INPIT |
| 申请公布号 |
JP2011224965(A) |
申请公布日期 |
2011.11.10 |
| 申请号 |
JP20100280514 |
申请日期 |
2010.12.16 |
| 申请人 |
TOSHIBA CORP |
发明人 |
KAWAMURA YOSHIHISA;KOBAYASHI KATSUTOSHI;ITO SHINICHI;HAYASHI HIDEKAZU;TOMITA HIROSHI |
| 分类号 |
B29C33/72;B29C59/02;B81C3/00;H01L21/027 |
主分类号 |
B29C33/72 |
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