| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a dicing method and a dicing apparatus having compact constitution and capable of improving the operating efficiency. <P>SOLUTION: A workpiece supply waiting part 40 in which a workpiece W before working is stocked and a workpiece collection waiting part 50 which stocks a workpiece W after working are installed facing each other across a working part 30. The workpiece W before working is stocked in the workpiece supply waiting part 40 in such a manner that a surface attached with a dicing film T faces the side of a work table 20 in a vertically upright position. The workpiece W after working is stocked in the workpiece collection waiting part 50 in such a manner that the surface attached with the dicing film T faces the work table 20 side in a vertically upright position. The workpiece W stocked in the workpiece supply waiting part 40 is supplied to the work table 20 by a workpiece supply device 60. The workpiece W after working is collected from the work table 20 by a workpiece collection device 70 and transferred to the workpiece collection waiting part 50. <P>COPYRIGHT: (C)2012,JPO&INPIT |
