| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method for aligning a spot light position of an optical displacement detection mechanism enabling easy and secure alignment of the light from a source with an object to be measured or a light receiving surface of a photodetector. <P>SOLUTION: In an optical displacement detection mechanism comprising a light source 10 for irradiating a cantilever 6 as a measuring object, a light source driving circuit 21 for driving the light source 10, a photodetector 16 for detecting light intensity by receiving the light after irradiation of the cantilever 6 from the light source 10, and an amplifier 22 for amplifying a detected signal by the photodetector 16 with a predetermined gain, the detection sensibility of the photodetector 16 is set lower than the sensibility for actually measuring a target object using a gain (amplification factor) controller so as to align a light spot 20 with a predetermined position of the photodetector 16 using an alignment mechanism 18 for the photodetector. <P>COPYRIGHT: (C)2012,JPO&INPIT |
