| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an automatic defect inspection device that sets a detection condition at starting-up of a plurality of automatic defect inspection devices and periodically corrects the detection condition. <P>SOLUTION: An automatic defect inspection device detects defect failure of a color filter substrate. The automatic defect inspection device is provided with conveying means that conveys the color filter substrate, illuminating means that illuminates the conveyed color filter substrate, imaging means that takes an image of the illuminated color filter substrate, image processing means that extracts defect failure from the image taken and control means that controls the conveying means, the illuminating means, the imaging means and the image processing means. The automatic defect inspection device is further provided with defect detection condition setting means in which an inspection result inspected at an upstream automatic defect inspection device arranged in a manufacturing process for manufacturing the color filter substrate is used in a downstream automatic defect inspection device so as to set a defect detection condition of the downstream automatic defect inspection device. <P>COPYRIGHT: (C)2012,JPO&INPIT |
