发明名称 REMOVING A SHEET FROM THE SURFACE OF A MELT USING GAS JETS
摘要 In one embodiment, a sheet production apparatus comprises a vessel configured to hold a melt of a material. A cooling plate is disposed proximate the melt and is configured to form a sheet of the material on the melt. A first gas jet is configured to direct a gas toward an edge of the vessel. A sheet of a material is translated horizontally on a surface of the melt and the sheet is removed from the melt. The first gas jet may be directed at the meniscus and may stabilize this meniscus or increase local pressure within the meniscus.
申请公布号 US2011271899(A1) 申请公布日期 2011.11.10
申请号 US201113037789 申请日期 2011.03.01
申请人 VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES, INC. 发明人 KELLERMAN PETER L.;THRONSON GREGORY D.;SUN DAWEI
分类号 C30B15/06;C30B11/02 主分类号 C30B15/06
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